@inproceedings{hensel2022machinehealth,
  author = {Wagner, Thomas and Hensel, Burkhard and Schneider, Germar and Halfter, Martin and Hertel, Oliver},
  title = {{Machine Health diagnostics of Semiconductor Facility equipment}},
  booktitle = {20th European Advanced Process Control and Manufacturing Conference (apc|m)},
  address = {Toulon, France},
  month = {April},
  year = {2022},
}